Integrated optical circuit manufacturing process

G - Physics – 02 – B

Patent

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Details

G02B 6/136 (2006.01) G02B 6/12 (2006.01) G02B 6/34 (2006.01)

Patent

CA 2275740

L'invention concerne un procédé de fabrication d'un circuit optique intégré comportant au moins un guide d'onde gravé et enterré, de type BRS, couplé à au moins un guide d'onde gravé et non enterré, de type ridge. Ce procédé consiste particulièrement à définir au préalable l'empreinte des deux types de guide, au moyen d'un masque commun, puis à définir les deux types de guide par gravures successives.

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