G - Physics – 01 – L
Patent
G - Physics
01
L
G01L 1/12 (2006.01) G01L 1/16 (2006.01) H01L 27/118 (2006.01)
Patent
CA 2058024
ABSTRACT A method of making an integrated sensor is described wherein semiconductor array processing steps are performed on a circuit area of a silicon substrate to form a partially completed integrated sensor assembly. Following selection of a sensor from among a variety of sensor types, semiconductor processing steps from the sensor in a separate sensor area of the substrate, complete the array and interconnect the sensor with the array.
Honeywell Inc.
Smart & Biggar
LandOfFree
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