Integrated sensor array

G - Physics – 01 – L

Patent

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Details

G01L 1/12 (2006.01) G01L 1/16 (2006.01) H01L 27/118 (2006.01)

Patent

CA 2058024

ABSTRACT A method of making an integrated sensor is described wherein semiconductor array processing steps are performed on a circuit area of a silicon substrate to form a partially completed integrated sensor assembly. Following selection of a sensor from among a variety of sensor types, semiconductor processing steps from the sensor in a separate sensor area of the substrate, complete the array and interconnect the sensor with the array.

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