Integrated silicon accelerometer with cross-axis compensation

Details Integrated silicon accelerometer with cross-axis compensation Integrated silicon accelerometer with cross-axis compensation

G - Physics

01

P

73/42

G01P 15/12 (2006.01) G01P 15/08 (2006.01)

Patent

CA 1220642

ABSTRACT An accelerometer comprising a sheet of silicon configured as an inertia plate separate from a support plate except at a pair of flexure sites spaced along an axis, each flexure site including a pair of flexures mutually offset so that upon acceleration in a direction perpendicular to the inertia plate the flexures partake of compound bending, and stress responsive resistors at said flexures positioned so that upon compound bending the resistors change resistance in the opposite sense.

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