Interface-infused nanotube interconnect

Details Interface-infused nanotube interconnect Interface-infused nanotube interconnect

C - Chemistry, Metallurgy

23

C

C23C 16/26 (2006.01) C01B 31/00 (2006.01) C23C 30/00 (2006.01) H01L 21/768 (2006.01) H01L 23/532 (2006.01)

Patent

CA 2673705

The invention relates to carbon nanotube arrays and methods for the preparation of carbon nanotube arrays. The carbon nanotube arrays include an aligned carbon nanotube array, wherein at least one of the ends of the carbon nanotube array includes a coating layer that is infused into the carbon nanotube array.

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