G - Physics – 01 – B
Patent
G - Physics
01
B
G01B 9/02 (2006.01)
Patent
CA 2090682
2090682 9204594 PCTABS00011 Methods and microscopes for measuring the difference(s) between at least two energy path lengths are disclosed. According to one embodiment a confocal interference microscope (100) may be employed to build up an interferogram of surface (123) of object (124) as follows. A portion of the light beam from coherent laser diode (101) is coherently guided to exit (115) and focussed into a diffraction limited spot (125) intersecting surface (123) by high quality lens (122). A portion of the scattered signal light resulting from spot (125) is collected by lens (122) and confocally injected back into exit (115) to be guided back to coupler (108). A second portion of the light beam from diode (101) is coherently guided to end (121) from whence it emerges collimated. This collimated beam termed the reference beam is partially reflected by mirror (126) through end (121) and is guided back to coupler (102) where it interferes with the signal beam. The result of the interference is detected by detector (127) and fed to computer (128). A portion of the signal light injected into fibre exit (115) is guided to detector (145) which detects the intensity level. This intensity level is fed to computer (128) and used to control scanner (130) so as to maintain the focus of spot (125) on surface (123). A portion of the reference beam reflected by mirror (126) is injected into single mode fibre (135) and guided coherently to coupler (138) where it interferes with illuminating light guided coherently from laser diode (101) and hence detected by detector (142). The resulting signal is fed to computer (128). While scanner (130) is moving the exits computer (128) keeps track of their position by monitoring the interference signal from detector (142).
Commonwealth Scientific And Industrial Research Organisation
Gowling Lafleur Henderson Llp
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