Interferometer having a micromirror

Details Interferometer having a micromirror Interferometer having a micromirror

G - Physics

01

J

G01J 3/45 (2006.01) G01J 3/26 (2006.01) G01J 3/453 (2006.01) G01J 9/02 (2006.01) G02B 5/28 (2006.01)

Patent

CA 2169141

An interferometer includes a beamsplitter for splitting a source beam into a test beam and a reference beam, an imaging device for detecting an interference pattern, a mirror disposed in a path of the test beam for reflection of the test beam toward the imaging device, a micromirror disposed in a path of the reference beam for reflection of a portion of the reference beam toward the imaging device, and a focusing mechanism disposed for focusing the reference beam on the micromirror. The micromirror has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the reference beam focused thereon by the focusing mechanism. A spatial filter for reducing effects of aberration in a beam includes a reflector disposed upon a transpar- ent base wherein the reflector has a lateral dimension not exceeding the approximate lateral dimension of a central lobe of the spatial intensity distribution of the beam focused upon the reflector. A method of filtering a beam in a wavefront measurement system is also provided. This method includes focusing the beam, reflecting a particular first portion of the focused beam, and transmitting a second portion of the beam.

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