Ion beam assisted method of producing a diamond like carbon...

Details Ion beam assisted method of producing a diamond like carbon... Ion beam assisted method of producing a diamond like carbon...

C - Chemistry, Metallurgy

23

C

C23C 16/26 (2006.01) C23C 14/06 (2006.01) C23C 14/22 (2006.01)

Patent

CA 2143275

The present invention relates to an ion beam assisted method of producing a diamond like carbon (DLC) coating on the surface of a material. More particular, the invention relates to an ion beam assisted method using a fullerene precursor to produce a DLC coating, wherein the chemical composition of the ion beam and precursor are selectively chosen to determine the physical properties of the DLC coating.

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