Ion beam gun

Details Ion beam gun Ion beam gun

H - Electricity

01

J

H01J 27/16 (2006.01) H01J 27/18 (2006.01)

Patent

CA 2121892

The present invention discloses an ion beam gun wherein the ions are produced by radio-frequency excitation. A plasma is created in a vessel (100), or chamber, by ionizing gas molecules by means of a coil (230) about the outside of the vessel. The coil (230) receives radio-frequency energy which ionizes the gas molecules. The inside of the vessel contains an anode (242, 244) and resonator (250) to assist in shaping and containing the plasma. The resonator (250) acts as an internal electrode to produce eddy currents generated by the radio-frequency energy to enhance the plasma. A multi-apertured screen grid (260) also helps contain and shape the plasma within the chamber while a multi-apertured accelerator grid (262) is used to extract the ions from the ion beam gun.

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