Ion beam implantation display method and apparatus

Details Ion beam implantation display method and apparatus Ion beam implantation display method and apparatus

H - Electricity

01

J

356/176, 356/192

H01J 37/30 (2006.01) H01J 37/317 (2006.01)

Patent

CA 1266923

Ion Beam Implantation Display Method and Apparatus Abstract A display system for use in monitoring ion beam characteristics of an ion beam implantation system. The display includes a cathode ray tube having vertical and horizontal deflection controls. The vertical deflection control is modulated by an indication of ion beam current impinging upon a target wafer. The horizontal deflection control is modulated with a signal related to beam scanning by a deflection electrode. The resultant image provides a system operator with a visual indication of the ion beam.

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