B - Operations – Transporting – 23 – H
Patent
B - Operations, Transporting
23
H
327/34
B23H 1/02 (2006.01) H01J 37/08 (2006.01) H01J 37/305 (2006.01)
Patent
CA 1217532
Abstract of the Disclosure The disclosed ion beam machining device has a plasma-generating chamber, a machining chamber, and an ion-extracting grid disposed between the two chambers, which grid has an insulator layer facing the plasma- generating chamber and a conductor layer facing the machining chamber.
448355
Masuzawa Takahisa
Tsuchiya Ichiro
Ogilvy Renault Llp/s.e.n.c.r.l.,s.r.l.
University Of Tokyo
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