Ion beam machining device

B - Operations – Transporting – 23 – H

Patent

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B23H 1/02 (2006.01) H01J 37/08 (2006.01) H01J 37/305 (2006.01)

Patent

CA 1217532

Abstract of the Disclosure The disclosed ion beam machining device has a plasma-generating chamber, a machining chamber, and an ion-extracting grid disposed between the two chambers, which grid has an insulator layer facing the plasma- generating chamber and a conductor layer facing the machining chamber.

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