Ion etching through a pattern mask

Details Ion etching through a pattern mask Ion etching through a pattern mask

H - Electricity

01

L

356/12, 327/72

H01L 21/263 (2006.01) C23F 4/00 (2006.01) H01F 10/00 (2006.01) H01L 21/00 (2006.01)

Patent

CA 926523

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