Ion-getter vacuum pump with gun and grid structure arranged...

Details Ion-getter vacuum pump with gun and grid structure arranged... Ion-getter vacuum pump with gun and grid structure arranged...

H - Electricity

01

J

316/42

H01J 41/16 (2006.01) H01J 7/16 (2006.01) H01J 17/22 (2006.01)

Patent

CA 896073

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