Ion-nitriding apparatus

Details Ion-nitriding apparatus Ion-nitriding apparatus

H - Electricity

01

J

204/167.4

H01J 37/32 (2006.01) C23C 8/36 (2006.01)

Patent

CA 1113425

ION-NITRIDING APPARATUS ABSTRACT OF THE DISCLOSURE This invention relates to a retort type apparatus for ion-nitriding treatment which is so designed as to effect heating and nitriding of a workpiece at high thermal efficiency, with excellent uniformity and in a short time by using both a glow discharge and heat produced by a heating element. More specifically, the apparatus comprises a hollow vacuum reacting furnace with a furnace body of double wall construction, i.e. an outer wall and an inner shielding wall. There is also a lid for taking in and out a workpiece for treatment. The heating element is disposed between the outer wall and the inner shielding wall and is powered by an AC voltage source. A DC voltage source generates the glow discharge when ion-nitriding treatment gas is present between the inner shielding wall, as anode, and a workpiece within the hollow vacuum reacting furnace, as cathode.

268433

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