Ion-plasma gun for ion-milling machine

Details Ion-plasma gun for ion-milling machine Ion-plasma gun for ion-milling machine

H - Electricity

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H01J 37/31 (2006.01) H01J 27/08 (2006.01) H01J 37/08 (2006.01) H05H 1/48 (2006.01)

Patent

CA 1039363

ABSTRACT OF THE DISCLOSURE An ion gun includes an elongated electrode with a hollow end portion closed by a perforated end plate. The end plate is positioned parallel to a perforated flat elec- trode of opposite electrical polarity. An insulated sleeve encompasses the elongated electrode and extends outwardly from the perforated end towards the flat electrode. The sleeve length is separated into two portions of different materials. The first is formed of a high-temperature material that extends over the hollow portion of the elongated electrode where the arc is initiated by a point source electrode. The second sleeve portion extending over the remainder of the elongated electrode is of a resilient material for enhanced seal-forming ability and retention of plasma gas. Perforations are arranged in the flat electrode in a mutually opposing triangular pattern to project a plasma beam having a generally flat current profile towards a target requiring precision milling.

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