Ion scattering spectrometer with two analyzers preferably in...

Details Ion scattering spectrometer with two analyzers preferably in... Ion scattering spectrometer with two analyzers preferably in...

G - Physics

01

N

358/9

G01N 23/22 (2006.01) G01N 23/203 (2006.01) H01J 49/00 (2006.01)

Patent

CA 1058772

Abstract Improved apparatus and method for measuring ions scattered from a surface, to thereby determine the mass of atoms at the surface. The apparatus includes two analyzers, perferably an energy analyzer and mass analyzer positioned in tandem. The mass analyzer may be tuned to pass only ions having the same mass as ions in an incident ion beam, and to reject sputtered ions, some of which may have the requisite energy to pass through the energy analyzer under a given set of conditions.

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