Ion source

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H - Electricity

01

J

358/25

H01J 27/16 (2006.01) C23C 16/48 (2006.01) F04B 37/06 (2006.01) H01J 27/02 (2006.01) H01J 37/317 (2006.01) H01L 21/26 (2006.01)

Patent

CA 1306074

ABSTRACT OF THE DISCLOSURE : The present invention provides an ion source comprising an ion-generating chamber and an anode formed of multi-capillary for sending high-density atoms or molecules to be ionized into the ion-generating chamber in a constant direction.

583676

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