Junction field effect transistor and method of manufacturing...

H - Electricity – 01 – L

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H01L 21/337 (2006.01) H01L 29/772 (2006.01) H01L 29/80 (2006.01) H01L 29/808 (2006.01)

Patent

CA 2395608

A low-loss junction field-effect transistor (JFET) capable of switching at high voltage and high current comprises a gate region (2) of a second conductivity type provided on the surface of a semiconductor substrate, a source region (1) of a first conductivity type, a channel region (10) of the first conductivity type extending continuously from the source region, a region (5) of the second conductivity type extending continuously from the gate region to define the channel region, a drain region (3) of the first conductivity type provided on the backside, and a drift region (4) of the first conductivity type extending continuously from the channel to the drain in the direction of the substrate thickness. The concentrations of the first conductivity type dopant in the drift region and the channel region are lower than the concentrations of the first conductivity type dopant in the source region and the drain region and the concentration of the second conductivity type dopant in the defining region.

L'invention concerne un transistor à effet de champ à jonction (JFET) à faible perte capable de commuter à une tension et à un courant élevés comprenant une zone de grille (2) d'un second type de conductivité disposée sur la surface d'un substrat à semi-conducteur, une zone de source (1) d'un premier type de conductivité, une zone de canal (10) du premier type de conductivité s'étendant en continu à partir de la zone de source, une zone (5) du second type de conductivité s'étendant en continu à partir de la zone de grille afin de définir la zone de canal, une zone de drain (3) du premier type de conductivité située sur le côté arrière, enfin une zone de migration (4) du premier type de conductivité s'étendant en continu du canal au drain dans la direction de l'épaisseur du substrat. Les concentrations du dopant du premier type de conductivité dans la zone de migration et dans la zone de canal sont inférieures aux concentrations du dopant du premier type de conductivité dans la zone de source et dans la zone de drain et à la concentration du dopant du second type de conductivité dans la zone de définition.

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