C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
356/192
C30B 23/02 (2006.01) H01J 37/32 (2006.01)
Patent
CA 1276318
Abstract of the Invention A large cross-section molecular beam source the controlled delivery of a reactant species to provide deposition or etching over a generally large cross-sectional surface area of a substrate is described. The apparatus includes a source of the reactant species, typically as a gaseous material, a microchannel array for providing a directionalized, low divergence molecular beam of the reactant species having a cross-sectional dimension directly comparable to that of the substrate. The apparatus further includes a substrate mount that maintains the substrate so as to allow the direct impingement of the columnarized molecular beam on the wide area surface of the substrate. The reactant species source, microchannel array and substrate mount are housed within a vacuum chamber adapted to maintain a vacuum sufficient to enable the formation of the directionalized molecular beam of the reactant species upon its passing through the microchannel array.
546173
Askary Farid
Balooch Mehdi
Farnaam Mohammad R.k.
Askary Farid
Balooch Mehdi
Farnaam Mohammad R.k.
Gowling Lafleur Henderson Llp
Plaser Corporation
LandOfFree
Large cross-sectional area molecular beam source for... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Large cross-sectional area molecular beam source for..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Large cross-sectional area molecular beam source for... will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1203856