H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 21/68 (2006.01) B23K 26/02 (2006.01) H01L 21/66 (2006.01)
Patent
CA 2328693
The present invention describes a laser alignment tool which provides a quick and practical alignment of an evaporator source and a wafer holder in an evaporator chamber. The tool comprises an aluminum disk and a support structure carrying a laser pointer. The laser pointer is placed within a hollow cylinder attached to the disk where a position of the laser pointer can be adjusted to emit light perpendicular to the disk. The dimensions and shape of the disk are chosen so as to imitate a wafer substrate in order to fit one of the wafer holder slots. When the alignment tool is placed in a slot instead of the wafer, the holder is rotated, and the light beam from the laser pointer describes substantially circular trajectories depending on the mutual arrangement between the source and the holder. By observing these trajectories a conclusion can be made whether the source and the holder are aligned properly. For example, a position of a virtual source can be determined as a single spot in space to which the light beam points during the rotation of the wafer holder. In modifications to the above embodiment, several alignment tools of the invention can be used for alignment purposes and/or for identification imperfections of curvature of wafer holders.
Cheng Kezia
Este Grantley O.
Cheng Kezia
de Wilton Angela C.
Este Grantley O.
Nortel Networks Limited
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