Laser beam scanning system

Details Laser beam scanning system Laser beam scanning system

G - Physics

02

B

88/96

G02B 27/00 (2006.01) G02B 26/10 (2006.01) G02F 1/33 (2006.01) G03F 7/20 (2006.01)

Patent

CA 1166050

- 1 - Abstract: A laser beam scanning system is designed for focusing a laser beam to a fine spot and for precisely scanning a large field. The system has an acousto-optical deflector that can deflect a laser beam in the direction of one axis or in the directions of two axes, while maintaining the fine spot diameter, in order to scan a small field. A relay lens projects this deflection point to the center of an objective lens. The objective lens can effect focus- ing to the fine spot. A high speed, accurate carriage can move in the biaxial directions. A precise position detector detects the position of said carriage, and a controller controls the various functions whereby to make it possible to precisely deflect the laser beam over a large field. As a result a scanning operation over a large field at high speed and with high accuracy can be performed by the laser beam.

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