Laser beam tertiary positioner apparatus and method

B - Operations – Transporting – 23 – K

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Details

B23K 26/08 (2006.01) B23K 26/00 (2006.01) B23K 26/02 (2006.01) B23K 26/38 (2006.01) G02B 26/08 (2006.01)

Patent

CA 2517214

A tertiary positioner system (80) of this invention employs X- and Y-axis translation stages (86, 88), galvanometer-driven mirrors (64, 66), and a fast steering mirror ("FSM") (120) to direct a laser beam (90) to target locations (121) on a workpiece (92). A positioning signal is received by a low-pass filter (103) that produces filtered position data for driving the X- and Y- axis translation stages. The actual positions of the X- and Y-axis translation stages are subtracted from the unfiltered positioning data to produce an X-Y position error signal for driving the galvanometer-driven X- and Y- axis mirrors. The actual mirror positions are subtracted from the actual positions of the X- and Y-axis translation stages to generate a positional error signal representing the difference between the commanded and actual positions of the laser beam. The positional error signal drives the FSM to rapidly correct any positional errors.

L'invention concerne un système positionneur tertiaire (80) qui utilise des platines de translation horizontale et verticale (86, 88), des miroirs à commande galvanométrique (64, 66) et un miroir de direction rapide ("FSM") (120) pour pointer un faisceau laser (90) sur des emplacements cibles (121) d'une pièce (92). Un signal de positionnement est reçu par un filtre passe-bas (103) produisant des données de position filtrées pour commander les platines de translation horizontale et verticale. Les positions réelles desdites platines sont soustraites des données de positionnement non filtrées de façon à produire un signal d'erreur de position horizontale-verticale pour commander le miroir horizontal et le miroir vertical à commande galvanométrique. Les positions réelles des miroirs sont soustraites des positions réelles des platines de translation horizontale et verticale de façon à générer un signal d'erreur de position représentant la différence entre les positions prescrites et réelles du faisceau laser. Le signal d'erreur de position commande le FSM pour corriger rapidement toute erreur de position.

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