Laser device

Details Laser device Laser device

H - Electricity

01

S

H01S 3/106 (2006.01) H01S 3/097 (2006.01) H01S 3/137 (2006.01) H01S 3/225 (2006.01)

Patent

CA 2059134

ABSTRACT The present invention relates to a technique which is effectively applied to the control of an oscillation wavelength and an oscillation output in a laser device. The object of the invention is to adjust an angle of inclination of a wavelength selection element such as an etalon with high accuracy to always stabilize a laser output wavelength from a laser resonator. The present invention provides a laser device having at least first and second wavelength selection elements arranged in series on a light path, at least one angle of inclination being adjusted to form a laser light from a laser medium into a narrower band, said laser device comprising an automatic micrometer head for finely adjusting said angle of inclination. By using an automatic micrometer head capable of finely controlling a moving amount, fine adjustment of an angle of inclination with respect to a light path of a wavelength selection element can be made. Therefore, it is possible to always stabilize a wavelength of a laser light released from a laser resonator. Accordingly, the present invention can be effectively utilized for uses such as a light source in a lithography step in the manufacture of a semiconductor. -38-

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