Laser machining apparatus

Details Laser machining apparatus Laser machining apparatus

B - Operations, Transporting

23

K

B23K 26/08 (2006.01) B23K 26/06 (2006.01) H01L 21/00 (2006.01) H05K 3/00 (2006.01)

Patent

CA 2095068

A laser machining apparatus comprises a mask, a reflecting mirror and an imaging optical system. Laser light reflected by the mask and also by the reflecting mirror passes through the mask and images on the work for machining the work. The laser machining apparatus comprises means for causing said mask to move in parallel with said work for machining the work. This laser machining apparatus is able to machine a work having a large surface using a small apertured mask. Another type of laser machining apparatus comprises a mask, a platform and an imaging optical system. The mask and the work are mounted in the same plane on the platform and driven so that the image of the mask is mapped on the work via the imaging optical system. The laser machining apparatus is able to machine a large area economically and with high accuracy.

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