Laser machining method and laser machining apparatus

Details Laser machining method and laser machining apparatus Laser machining method and laser machining apparatus

B - Operations, Transporting

23

K

B23K 26/40 (2006.01) B23K 26/18 (2006.01) C03C 21/00 (2006.01)

Patent

CA 2258457

In order to form a fine pattern at high speed with respect to a material such as quartz glass exhibiting a remarkable band gap, having a short wavelength at absorption edge of light, and having high bond energy between constituent atoms, laser beam being transparent as to a material to be worked is irradiated thereupon, at the same time, plasma is produced at a place close to an objective surface of the material to be worked, and ablation is generated on the objective surface of the material to be worked by means of interactions between the plasma and laser beam irradiated upon the material to be worked, thereby to work the material.

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