Laser micromachining apparatus with interchangeable mask

Details Laser micromachining apparatus with interchangeable mask Laser micromachining apparatus with interchangeable mask

B - Operations, Transporting

26

F

327/1.4

B26F 1/31 (2006.01) B23K 26/06 (2006.01)

Patent

CA 1038935

ABSTRACT OF THE DISCLOSURE Laser micromachining apparatus for producing a selectable machining pattern on a workpiece, for example a substrate of paper or rubber or for producing a silicon integrated circuit. A high power laser beam carrying a con- trollable sequence of light pulses passes through a variable attenuator unit and then through a beam expander unit before impinging on a mask containing an enlarged pattern of the mark to be machined. The pattern in the mask consists of a suitable arrangement of small apertures. After diffraction through these apertures and focalisation by a converging optical element, the laser light passes through an optical imaging unit which images the mask onto the workpiece to pro- duce said selectable machining pattern thereon.

246330

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