Laser process apparatus

B - Operations – Transporting – 23 – K

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

B23K 26/04 (2006.01) B23K 26/06 (2006.01) B41J 2/16 (2006.01)

Patent

CA 2055899

In a laser process apparatus, a plurality of holes each having a predetermined shape are formed in a work upon radiation of light from an excimer laser. The apparatus is provided with a mask, in which a plurality of predetermined small holes are formed in correspondence with the plurality of holes to be formed in the work, and which allows laser light from said excimer laser to pass through said small holes thereof toward the work, a projection optical system for projecting optical images each having a predetermined shape onto the work through the small holes of said mask, a measurement optical system for measuring a work position, and a moving stage for moving the work on the basis of a measurement result form said measurement optical system.

Dans un appareil à traitement par laser, un ensemble de trous ayant chacun une forme prédéterminée sont produits dans une pièce par exposition à la lumière d'un laser excimère, l'appareil étant muni d'un masque, dans lequel un ensemble de petits trous de forme prédéterminée sont formés de façon à correspondre à l'ensemble de trous à produire dans la pièce et dont lesdits petits trous laissent passer la lumière laser provenant dudit laser excimère en direction de la pièce, d'un système optique de projection servant à projeter sur la pièce par les petits trous dudit masque des images optiques ayant chacune une forme prédéterminée, d'un système optique de mesure permettant de mesurer une position de la pièce et d'une partie mobile permettant de déplacer la pièce en fonction d'un résultat de mesure fourni par ledit système optique de mesure.

LandOfFree

Say what you really think

Search LandOfFree.com for Canadian inventors and patents. Rate them and share your experience with other people.

Rating

Laser process apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Laser process apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Laser process apparatus will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFCA-PAI-O-1971828

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.