Laser surface treatment device and method

Details Laser surface treatment device and method Laser surface treatment device and method

B - Operations, Transporting

23

K

B23K 26/02 (2006.01) G02F 1/1333 (2006.01) G09G 3/36 (2006.01) H01L 21/66 (2006.01)

Patent

CA 2225422

In a laser surface treatment method, at least two generally similar surfaces of a given depth are provided, on each of which a treatment laser beam is to be applied in one or several steps, with properties selected so as to change the physical state of each surface. At least one ellipsometry measurement is made at least before one of the applications of the beam on the second surface, in at least one region of the first surface, so as to obtain a physico- chemical characterisation of the said first surface, the laser beam application and the ellipsometry measurement being conducted in generally similar working conditions, so that the change of the physical state of each surface produced by the laser can be controlled in real time, in situ, rapidly and non destructively, on the basis of said characteristics.

Dans le procédé de traitement de surface par laser, on dispose d'au moins deux domaines superficiels généralement semblables, de profondeur donnée, sur chacun desquels doit être appliqué, en une ou plusieurs fois, un faisceau laser de traitement, de caractéristiques choisies pour changer l'état physique de chaque domaine superficiel. On effectue au moins une mesure d'ellipsométrie avant l'une au moins des applications du faisceau laser de traitement sur le second domaine superficiel, en au moins une zone dudit premier domaine superficiel, afin d'obtenir une caractérisation physicochimique dudit premier domaine superficiel, l'application du faisceau laser et la mesure d'ellipsométrie étant réalisées dans des conditions de travail généralement semblables, ce qui permet de contrôler en temps réel, sur site, de façon non destructive et rapidement, le changement d'état physique de chaque domaine superficiel obtenu par laser à l'aide de ladite caractérisation.

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