Laser thickness gauge

Details Laser thickness gauge Laser thickness gauge

G - Physics

01

B

G01B 11/02 (2006.01) G01B 11/06 (2006.01)

Patent

CA 2067400

BP File No. 6870-001 - 17 - ABSTRACT OF THE DISCLOSURE An apparatus for determining the position of a surface of a specimen has a beam source which produces a narrow beam. This is split into a primary beam and a secondary beam by a beam splitter. The primary beam and the secondary beam are directed by the beam splitter or by a reflector onto the surface of the specimen. The image of the impact points of the primary and secondary beams are monitored by a photosensor array. A processor, using these images, calculates the distance between the surface of the specimen and the reference point. The use of two such apparatus allows for the thickness of the specimen to be measured.

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