G - Physics – 01 – B
Patent
G - Physics
01
B
G01B 11/14 (2006.01) G01B 11/02 (2006.01) G01B 11/04 (2006.01) G01B 11/06 (2006.01) G01B 11/28 (2006.01) G01N 21/86 (2006.01)
Patent
CA 2587245
A system (10) and method of determining a height and/or position of at least one element (20) on an area array device. A laser beam (30, 40) scans the area array device using at least two different laser light intensities. Reflected light (3OA, 40A) is sampled, and the height and/or position of the element (20) is determined using, e.g., optical triangulation.
L'invention concerne un système et un procédé permettant de déterminer une hauteur et/ou une position d'au moins un élément sur un dispositif matriciel. Un faisceau laser balaie le dispositif matriciel au moyen d'au moins deux intensités lumineuses de laser différentes. La lumière réfléchie est échantillonnée, et la hauteur et/ou position de l'élément est déterminée au moyen, par ex., de la triangulation optique.
Rudolph Technologies Inc.
Rvsi Inspection Llc
Smart & Biggar
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