Lens and deflection unit arrangement for electron beam columns

Details Lens and deflection unit arrangement for electron beam columns Lens and deflection unit arrangement for electron beam columns

H - Electricity

01

J

358/10

H01J 37/147 (2006.01) H01J 29/70 (2006.01) H01J 29/76 (2006.01) H01J 37/04 (2006.01)

Patent

CA 1024667

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