C - Chemistry – Metallurgy – 07 – F
Patent
C - Chemistry, Metallurgy
07
F
C07F 1/00 (2006.01) B01J 19/12 (2006.01) B05D 3/00 (2006.01) C07F 15/00 (2006.01) C23C 4/02 (2006.01) C23C 16/18 (2006.01) H05K 3/40 (2006.01)
Patent
CA 2090038
2090038 9207971 PCTABS00013 Chemical vapor deposition precursors for depositing copper, silver, rhodium and iridium metals on substrates comprise ligand stabilized +1 metal beta-diketonate coordination complexes of said metals. Uses of such precursors in CVD processes are also provided.
Baum Thomas H.
Larson Carl E.
Reynolds Scott K.
Baum Thomas H.
International Business Machines Corporation
Larson Carl E.
Reynolds Scott K.
Rosen Arnold
LandOfFree
Ligand stabilized +1 metal beta-diketonate coordination... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Ligand stabilized +1 metal beta-diketonate coordination..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ligand stabilized +1 metal beta-diketonate coordination... will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1800761