Light source for reduced projection

Details Light source for reduced projection Light source for reduced projection

H - Electricity

01

S

345/46

H01S 3/08 (2006.01) H01S 3/098 (2006.01) H01S 3/225 (2006.01)

Patent

CA 1294352

ABSTRACT OF THE DISCLOSURE A reduced projection light source comprises a laser device for emitting laser light having a lateral mode of multimodes, and an etalon located between a chamber of the laser device and a total reflection mirror. The light source is used as an exposure light source for transfer printing a ultrafine pattern on a semiconductor wafer.

527873

Affiliated with

Also associated with

Rating

Light source for reduced projection does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Light source for reduced projection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Light source for reduced projection will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1176549