G - Physics – 01 – L
Patent
G - Physics
01
L
26/201, 73/3
G01L 9/12 (2006.01) G01D 3/02 (2006.01) G01L 9/00 (2006.01)
Patent
CA 1227354
-16 - ABSTRACT OF THE DISCLOSURE A capacitive pressure transducer of the deflecting diaphragm type is adapted to be coupled to a capacitance transducing circuit and includes a generally planar, electrically conductive base member supported upon a first insulative substrate. A sensor member is supported upon a second insulative substrate in a generally parallel, spaced relationship from the base member and coacts with the base member to form a sensor capacitor. A reference member is generally coplanar with and in electrical isolation from the sensor member and coacts with the base member to form a reference capacitor. The sensor and reference members each have a plurality of segments interposed one with another. The sensor and reference capacitors have pressure-dependent capacitance values Cs and Cr respectively such that, for discrete pressures selected within an operative range of pressures, the output signals from the transducing circuit will be substantially linear. A method for making a deflecting diaphragm type capacitive pressure transducer adapted to be coupled to a capacitive transducing circuit includes the steps of providing a conductive base member supported upon a first insulative substrate and providing a second insulative substrate having a generally planar surface adapted to be disposed in a generally parallel, spaced relationship to the base member. A plurality of concentric circles is superimposed upon the planar surface to define a plurality of annular rings. Each ring is apportioned into a plurality of sensor incremental areas and a plurality of reference incremental areas. Electrically conductive sensor and reference members are disposed in a continuum -17- upon the sensor and reference incremental areas, respectively, in electrical isolation one from the other and coact with the base member to define sensor and reference capacitors, respectively. Apportioning is performed in a manner so that the sensor and reference capacitors have pressure dependent capacitance values such that for pressures occurring within an operative range, the output signals from the transducing circuit will be substantially linear.
477128
Johnson Service Company
Kirby Eades Gale Baker
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