Liquid indium source

Details Liquid indium source Liquid indium source

C - Chemistry, Metallurgy

07

F

C07F 5/00 (2006.01) C23C 16/18 (2006.01) C23C 16/448 (2006.01) C30B 25/02 (2006.01)

Patent

CA 2124052

A uniform dosimetry of vapor phase trimethylindium is provided by dissolving trimethylindium in a C3-C5 trialkylindium and bubbling an inert carrier gas through the solution.

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