Liquid metal ion source, secondary ion mass spectrometer,...

Details Liquid metal ion source, secondary ion mass spectrometer,... Liquid metal ion source, secondary ion mass spectrometer,...

H - Electricity

01

J

H01J 49/14 (2006.01)

Patent

CA 2703476

The invention relates to a liquid metal ion source, a secondary mass spectrometer, and an associated analysis method and the use thereof. The invention particularly relates to a mass spectrometric method according to the Gentle SIMS(G-SIMS) method. A liquid metal ion source is used, comprising a first metal having an atomic weight >= 190 U and another metal having an atomic weight <= 90 U. According to the invention, one of the two types of ions are alternately filtered out of the primary ion beam for the G-SIMS method and directed at the target as mass-pure primary ion beam.

L'invention concerne une source d'ions métaux liquides, un spectromètre de masse secondaire ainsi qu'un procédé d'analyse correspondant et leurs utilisations. L'invention concerne en particulier un procédé à spectrométrie de masse conforme au procédé Gentle SIMS (G-SIMS). A cet effet, on utilise une source d'ions métaux liquides qui renferme, d'une part, un premier métal d'un poids atomique = 190 U et, d'autre part, un autre métal d'un poids atomique = 90 U. Conformément à l'invention, pour le procédé G-SIMS, l'une des deux sortes d'ions provenant du faisceau d'ions primaires est filtrée alternativement, et est dirigée sur la cible en tant que faisceau d'ions primaires dépourvus de masse.

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