Liquid phase epitaxy apparatus

Details Liquid phase epitaxy apparatus Liquid phase epitaxy apparatus

C - Chemistry, Metallurgy

30

B

148/2.55

C30B 15/10 (2006.01) C30B 19/06 (2006.01)

Patent

CA 1229291

ABSTRACT: A sliding boat liquid phase epitaxy apparatus comprises a base 1, substrate support means 2 disposed on the base 1 and fixed in a horizontal sense with respect to the base 1, and a slidable well member 3 abutting and disposed above the substrate support means 2, and having at least one well 17 capable of holding growth solution 21. A significant problem in growth of layers by liquid phase epitaxy when using a sliding boat apparatus is to achieve sufficiently good wipe-off so as to produce a layer having a smooth surface. This apparatus uses sub- strate support means 2 comprising a block 6 provided with a flat-bottomed recess 7 in part of the top surface of the block 6 between the ends of the block 6, and a plate 8 fitting into the recess 7 so that the top surface of the plate 8 is level with the top surface of the block 6 out- side the recess 7, which plate 8 is provided with an aperture 9 capable of containing a substrate 20 on which an epitaxial layer is to be grown and can be disposed under the well 17. The plate 3 and well member 3 are made of different materials.

452809

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