Lithium niobate waveguide structures

Details Lithium niobate waveguide structures Lithium niobate waveguide structures

G - Physics

02

B

117/64, 88/97.4

G02B 6/10 (2006.01) G02B 6/12 (2006.01) G02B 6/136 (2006.01) H01L 21/31 (2006.01)

Patent

CA 1271372

ABSTRACT An improved method of producing a lithium niobate waveguide device is described, and comprises; (i) providing an optical waveguide path on a lithium niobate substrate; (ii) depositing a layer of dielectric material on the substrate; (iii) depositing a layer of conducting material on the dielectric layer; (iv) defining one or more electrode tracks on the conducting layer using a suitable mask; and (v) dry etching using an auto-registered process to remove the unmasked regions of the conducting layer and dielectric layer using a suitable etching medium.

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