Lithographic process and resulting article

Details Lithographic process and resulting article Lithographic process and resulting article

G - Physics

03

C

356/12, 96/215,

G03C 5/00 (2006.01) G03F 7/004 (2006.01) H01L 21/314 (2006.01)

Patent

CA 1135986

Abstract of the Disclosure This invention relates to lithographic patterning, particularly in fabrication of integrated circuitry, which is based on the photoinduced migration of silver into germanium selenide or other glassy material of appropriate absorption cross section for a chosen actinic radiation. Resists which are negative-acting yield ? resolution attributed to initial introduction of the silver in chemically combined form chosen so as to result in formation of a silver compound w? a glass component with the compound serving as silver source. Removal of excess silver-containing material is engineered on the basis of the form of silver introduction and results in conversion to a water soluble form. The developed, patterned resist may he used as a mask in a subsequent treatment of exposed portions of an underlying surface, such as etching, metallization, etc. An embodiment in which the now developed patterned resist serves as a dry etching mask during delineation of a relatively thick underlying layer of organic material is also commercially feasible. This procedure is particularly advantageous for use on partially processed circuitry in which prior operations have resulted in surface steps.

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