Lithographic technique using laser scanning for fabrication...

Details Lithographic technique using laser scanning for fabrication... Lithographic technique using laser scanning for fabrication...

H - Electricity

01

L

356/147, 356/199

H01L 21/70 (2006.01) G03F 7/20 (2006.01) H01L 21/26 (2006.01) H01L 21/302 (2006.01)

Patent

CA 2018262

Abstract of the Disclosure A microlithographic process of fabricating electronic components, such as, for example, integrated circuit chips and thin film read/write heads for computer disk systems, in which a laser is used to etch features defined by a mask. The laser is selected whose radiation will be absorbed by the workpiece being etched, and the masking material is selected so as to be highly reflective of the laser radiation. The masking material is patterned in a conventional manner so as to expose the portions of the workpiece material to be etched. When the laser is directed to the workpiece, the laser radiation etches the portions of the workpiece not protected by the mask. A preferred process of scanning with a laser is disclosed. Etching may be improved if performed under a liquid transparent to the laser radiation.

Affiliated with

Also associated with

Rating

Lithographic technique using laser scanning for fabrication... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Lithographic technique using laser scanning for fabrication..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Lithographic technique using laser scanning for fabrication... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1489398