Load cell and temperature correction of the same

Details Load cell and temperature correction of the same Load cell and temperature correction of the same

G - Physics

01

L

356/200, 265/26,

G01L 1/22 (2006.01) G01B 7/20 (1990.01)

Patent

CA 1275661

Abstract of the Disclosure A load cell and a method of correcting the same are provided wherein a beam member on which an insulator film is formed is prevented from being trimmed by a laser beam upon laser trimming thereof. The load cell comprises a span resistor member and a zero point resistor member both formed separately of the beam member and including a span temperature correcting thin film resistor and a zero point balance temperature correcting thin film resistor, respectively, each of which has a temperature coefficient and is formed on a substrate. the resistor members are applied to the insulator film on the beam member and the] thin film resistors are connected to a bridge circuit. The thin film resistors are trimmed with a laser beam to correct the span temperature correcting thin film resistor and the zero point balance temperature correcting thin film resistor for temperature. The substrates intercept a laser beam upon laser trimming of the thin film resistors.

533022

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