Load sensors

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G - Physics

01

L

73/69

G01L 1/10 (2006.01)

Patent

CA 1201903

LOAD SENSORS Abstract of the Disclosure An electro-mechanical load sensor is in the form of a mechanical resonant system with electrostatically coupled electrodes. The mechanical system is formed from a silicon wafer by a selective etching process and comprises a filament f between two terminations 12 and 13 carrying transverse plates M1 and M2. Electrostatic (capacitive) coupling to plate electrodes E1, E2, E3 in a self-exciting circuit drives the system. The resonant frequency for angular S vibrations with plates M1 and M2 in anti-phase varies with applied load L and is thus a measure of this load.

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