Loading and unloading mechanism for continuously rotating...

Details Loading and unloading mechanism for continuously rotating... Loading and unloading mechanism for continuously rotating...

G - Physics

01

N

73/124

G01N 33/48 (2006.01) G01N 1/14 (2006.01) G01N 1/28 (2006.01) G01N 35/00 (2006.01)

Patent

CA 1069340

LOADING AND UNLOADING MECHANISM FOR CONTINUOUSLY ROTATING CONTAINER Abstract of the Disclosure In a continuously rotating container having substrates to be processed, a loading and unloading mechanism is provided which introduces and removes the substrates without interruption of the rotation of the container. -1-

271702

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