Long life x-ray source target

Details Long life x-ray source target Long life x-ray source target

H - Electricity

01

L

356/176, 356/192

H01L 21/461 (2006.01) G03F 7/20 (2006.01) H05G 2/00 (2006.01)

Patent

CA 1250056

ABSTRACT Disclosed herein is an X-ray lithography system having a long life target. The life of the conventional target in X-ray generating systems for use in X-ray lithography systems is increased by providing means by which a single laser pulse can be provided to the same spot a plurality of times. In addition, new target designs are provided which are mechanically moved to allow laser pulses to be provided to adjacent points over a large surface area. One type of target is a cylindrical drum which is helically rotated to allow the laser pulse to intersect at all points along the helix of the drum. A second type of long life target is a long continuous strip in which a strip is moved from a feed reel to a take-up reel. The strip may be within a cassette.

494024

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