Low-abberation spectrometer objective with high secondary...

Details Low-abberation spectrometer objective with high secondary... Low-abberation spectrometer objective with high secondary...

H - Electricity

01

J

358/10

H01J 37/28 (2006.01) G01R 31/28 (2006.01) G01R 31/305 (2006.01) H01J 37/10 (2006.01) H01J 37/26 (2006.01) H01J 49/06 (2006.01) H01J 49/48 (2006.01)

Patent

CA 1242817

ABSTRACT OF THE DISCLOSURE The spectrometer objective of the invention is composed of a short focal length objective lens (OL) and a spectrometer- detector arrangement which is completely integrated in the magnetic lens, The working distance (L) has a decisive influence on the chromatic and spherical image defect of the objective lens (OL) which can be reduced with the arrangement of the invention and, thus, the diameter of the electron probe on the specimen (PR) can be substantially demagnified. An angle-independent accumulation of the secondary electrons (SE) are triggered such that the measuring location occurs according to the invention by imaging of the virtual source point (QS) of the secondary electrons (SE) into the center of a spherical opposing field which occurs in the spatial region between two spherical- symmetrical grid electrodes (K1 and K2).

511398

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