Low cost, center-mounted capacitive pressure sensor

Details Low cost, center-mounted capacitive pressure sensor Low cost, center-mounted capacitive pressure sensor

G - Physics

01

L

G01L 9/12 (2006.01) G01L 9/00 (2006.01)

Patent

CA 2181800

A variable capacitance type pressure sensor (10) with excel- lent manufacturability center-mounts an electrode (20) on an edge- mounted diaphragm (16) using a metal-glass-metal subassembly (18). An inner metal post (28) of the assembly is welded to the diaphragm (16). A solder or flowable cement (36) secures the elec- trode (20) to an outer metal collar (32) of the assembly (18) with the initial diaphragm-to-electrode spacing (38) set by a temporary shim (40). The position of the glass (30) and the physical lengths of the metallic members (28, 32) of the assembly are adjusted to provide self-compensation for temperature variations.

Cette invention se rapporte à un capteur de pression de type à capacitance variable (10) ayant d'excellentes caractéristiques de fabrication, dans la partie centrale duquel est montée une électrode (20) sur un diaphragme de bord (16) au moyen d'un sous-ensemble métal-verre-métal (18). Un montant métallique interne (28) faisant partie du sous-ensemble est soudé au diaphragme (16). Une soudure ou du ciment fluidifiable (36) fixe l'électrode (20) à un collier métallique externe (32) du sous-ensemble (18), l'espacement initial (38) entre le diaphragme et l'électrode étant fixé par une cale d'épaisseur temporaire (40). La position du verre (30) et les longeurs physiques des éléments métalliques (28, 32) de l'ensemble sont réglées pour assurer une compensation automatique des variations de température.

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