B - Operations – Transporting – 32 – B
Patent
B - Operations, Transporting
32
B
B32B 9/04 (2006.01) C09D 4/00 (2006.01) C23C 16/00 (2006.01) C23C 16/30 (2006.01) C23C 16/40 (2006.01) H01L 21/312 (2006.01) H05H 1/24 (2006.01)
Patent
CA 2330040
A dielectric film on a semiconductor or integrated circuit substrate and method of making it are disclosed, wherein said dielectric film has a backbone structure comprised substantially of inorganic groups and organic groups and organic side groups attached to said backbone structure to form a hybrid of inorganic and organic materials that provide said film having a dielectric constant of less than 4.0 and exhibiting weight loss of less than 2 % per hour at 400 ~C in nitrogen. The dielectric film is deposited on a substrate (14) located on a support (16) by a plasma CVD process, and the support being biased by a r.f. generator (18). An organosilicon precursor is introduced into a deposition chamber (11) through gas inlets (26 or 28).
L'invention porte sur un film diélectrique déposé sur un substrat de semi-conducteur ou de circuit imprimé et sur son procédé de fabrication. Ledit film comporte un squelette constitué principalement de groupes organiques et minéraux, et des groupes latéraux organiques fixés audit squelette pour former un hybride de matériaux organiques et minéraux conférant audit film une constante diélectrique inférieure à 4,0, et une perte de poids de moins de 2 % par heure à 400 ·C dans l'azote. Le dépôt du film s'effectue sur un substrat (14) placé sur un support (16) par DCPV au plasma après polarisation du support par un générateur RF (18) et introduction d'un précurseur organosilicié dans la chambre de dépôt par des entrées de gaz (26 ou 28).
Felts John
Lopata Eugene
Rose Peter
Silicon Valley Group Thermal Systems Llc
Smart & Biggar
LandOfFree
Low kappa dielectric inorganic/organic hybrid films and... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Low kappa dielectric inorganic/organic hybrid films and..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Low kappa dielectric inorganic/organic hybrid films and... will most certainly appreciate the feedback.
Profile ID: LFCA-PAI-O-1941994