Low leakage vacuum valve and chamber using same

Details Low leakage vacuum valve and chamber using same Low leakage vacuum valve and chamber using same

H - Electricity

01

L

270/104, 270/24

H01L 21/00 (2006.01) C23C 14/56 (2006.01) F16K 11/07 (2006.01) F16K 51/02 (2006.01) H01J 37/18 (2006.01)

Patent

CA 1016560

Affiliated with

Also associated with

Rating

Low leakage vacuum valve and chamber using same does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Low leakage vacuum valve and chamber using same, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Low leakage vacuum valve and chamber using same will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-928161