C - Chemistry – Metallurgy – 30 – B
Patent
C - Chemistry, Metallurgy
30
B
C30B 29/04 (2006.01) C30B 25/10 (2006.01) H01L 21/205 (2006.01)
Patent
CA 2474909
A diamond doped with lithium, especially a low-resistance n type semiconductor diamond doped with lithium and nitrogen; and a process for producing the same. In particular, a low-resistance n type semiconductor diamond containing lithium atoms and nitrogen atoms both in an amount of 1017 cm-3 or more, which low-resistance n type semiconductor diamond has such a structure that carbon atom interstitial positions thereof are doped with lithium atoms while carbon atom substitution positions thereof are doped with nitrogen atoms, the lithium atoms and nitrogen atoms disposed adjacent to each other. The low-resistance n type semiconductor diamond can be obtained through a process comprising in a diamond vapor-phase synthetic process, photolyzing a raw material according to a photoexcitation technique using vacuum ultraviolet radiation while with respect to a lithium material, exposing the same to excimer laser so as to effect scattering and supply of lithium atoms.
Diamant dopé au lithium, en particulier, diamant semi-conducteur de type n à basse résistance dopé au lithium et à l'azote et son procédé de préparation. Ce diamant contenant des atomes de lithium et des atomes d'azote respectivement en quantité égale ou supérieure à? ¿10?17¿ cm?-3¿ présente une structure dans laquelle les positions interstitielles des atomes de carbone sont dopées aux atomes de lithium, tandis que les positions substitutives des atomes de carbone sont dopées aux atomes d'hydrogène, les atomes de lithium et les atomes d'hydrogène étant placés en position contiguë les uns par rapport aux autres. On prépare ce diamant au moyen d'un procédé consistant en une synthèse en phase vapeur, en la photolyse d'une matière première selon une technique de photoexcitation mettant en application un rayonnement ultraviolet sous vide, tandis qu'en ce qui concerne le lithium, on expose ce dernier à un laser excimère, de façon à effectuer la diffusion des atomes de lithium et leur apport.
Imai Takahiro
Namba Akihiko
Takeuchi Hisao
Marks & Clerk
Sumitomo Electric Industries Ltd.
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