Low temperature melting binary glasses for leveling surfaces...

Details Low temperature melting binary glasses for leveling surfaces... Low temperature melting binary glasses for leveling surfaces...

H - Electricity

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H01L 21/76 (2006.01) H01L 21/3105 (2006.01) H01L 21/316 (2006.01) H01L 21/762 (2006.01) H01L 23/31 (2006.01) H01L 27/00 (2006.01)

Patent

CA 1196428

-12- LOW TEMPERATURE MELTING BINARY GLASSES FOR LEVELING SURFACES OF INTEGRATED CIRCUITS CONTAINING ISOLATION GROOVES William I. Lehrer John M. Pierce ABSTRACT An integrated circuit structure comprises a plurality of islands of semiconductor material (16-1 through 16-5) each island being separated from adjacent islands by a groove formed in annular shape around said island to laterally define the dimensions of each such island, an oxide (12, 14) formed over the surface of said grooves (13-1 through 13-6) and a selected glass (15) deposited on said oxide (14) in the grooves and over the top surface of said device, said glass having the property that it melts and flows at a temperature beneath the temperature at which dopants in the islands of semicon- ductor material substantially redistribute, said selected glass (15) having a substantially flat top surface thereby to give said structure a substantially flat top surface.

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