B - Operations – Transporting – 05 – D
Patent
B - Operations, Transporting
05
D
117/114, 117/162
B05D 3/02 (2006.01) C04B 41/49 (2006.01) H01L 21/316 (2006.01) H01L 23/29 (2006.01) H01L 21/314 (2006.01)
Patent
CA 2028696
LOW TEMPERATURE OZONOLYSIS OF SILICON AND CERAMIC OXIDE PRECURSOR POLYMERS TO CERAMIC COATINGS ABSTRACT The present invention relates to a rapid, low-temperature method of forming a ceramic or ceramic-like coating on a substrate. It comprises coating the substrate with a solution comprising a solvent and one or more hydrolyzed or partially hydrolyzed preceramic silicon alkoxides and, optionally, a ceramic oxide precursor. The solvent is evaporated and a preceramic coating thereby deposited on the substrate. The coated substrate is heated to a temperature of between about 40 to about 400°C. in the presence of ozone to ceramify the ceramic or ceramic-like coating. Additional protective coatings may be applied onto the coating thus produced.
Dow Corning Corporation
Gowling Lafleur Henderson Llp
Haluska Loren Andrew
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